Single-crystalline monolayer MoS2 arrays based high-performance transistors via selective-area CVD growth directly on silicon wafers

G. Zhu, X. Zhang, H. Fang, D. Sun, L. Wang, Z. Dai, L. Wei, Q. Lin, A. Li, Y. Min
January 2024
Type
Conference Paper
Publication
2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), pp. 1-2