Single-crystalline monolayer MoS2 arrays based high-performance transistors via selective-area CVD growth directly on silicon wafers

G. Zhu, X. Zhang, H. Fang, D. Sun, L. Wang, Z. Dai, L. Wei, Q. Lin, A. Li, Y. Min
一月 2024
类型
会议论文
出版物
2024 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), pp. 1-2